ST80 - In-situ Stress Monitor
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ST80 Slide 1
is an innovative surface curvature measurement apparatus that is capable of measuring surface radius of curvature in situ for a variety of applications. By employing the Stoney equation with known substrate material properties, the film stress can be calculated to provide real time process monitoring and diagnostics.
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  Slide 1
Surface curvature measurement precision:
10-3 [1/m] (1sigma)
(eq. R = 1 km)
Measurement accuracy:
+/-2% or +/-10-2 [1/m]
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Slide 1
Specifications:
Slide 1
Maximum curvature: Cmax= 0.1[1/m] or Rmin= 10 [m]
Minimum specimen size: f40mm or 30mm X 30mm
Data update rate: 1 Hz
Surface reflectivity range: 2% ~ 100%
Surface reflectivity accuracy and precision: 2%
Sensor head dimension: 8"W X 8"L X 6"H
Max distance between sensor and controller: 15'
Input voltage rating: 12V or Battery pack
Power Consumption: 1 Watt
Overall Weight: 8 lbs
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