NanoMap - Scanning 3D Surface Profilometer
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Features
- Seamless
integration of conventional contact profilometer and scanning probe
microscope ( SPM) technology
- Dual mode
operation (tip scan and stage scan) optimized for small area 3D mapping as
well as long range profiling
- Precision
piezo driven tip scan mode provides 3D scan range from 10um x 10um up to
500um x 500um, while the high grade optical reference flat enables long
range scan up to 50mm
- Integrated
color optical camera for direct sample viewing during scanning
- Wide measurement
dynamic range (up to 500um) as a result of the dual optical sensors
- Constant contact
force settable by software
- Integrated
vibration isolation platform for ultimate noise performance
- Simple
2-key operation with user friendly software interface
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Application
- 3D
surface profiling and roughness measurement from finely polished optical
surfaces to coarsely machined part
- Thin
and thick film step heights measurement
- Quantify
scratch and dig features, wear depth, width and volume
- Dimensional
analysis and surface texture characterization
- flatness or curvature measurement
- 2D
thin film stress measurement
- Micro
electronics surface analysis and MEMS device surface profiling
- Surface
defect inspection
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| Facility and Environment
- Humidity: 10-80%, relative
humidity, non-condensing
- Temperature: 65-85
Fahrenheit (ΔT < 1 degree/hour)
- Power
Requirements: 110/240 VAC, 50/60 Hz
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