NanoMap 500LS - Scanning 3D Surface Profilometer is an innovative combination of short and long range profilometer. It is capable of providing full 3D surface topographical image as well as accurate feature measurements.
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ST80 In-Situ Stress Monitor - ST80
is an innovative surface curvature measurement apparatus that is
capable of measuring surface radius of curvature in situ for a variety
of applications. By employing the Stoney equation with known substrate
material properties, the film stress can be calculated to provide real
time process monitoring and diagnostics.
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OPC200 Optical Process Controller - OPC200
is an optical thin film deposition controller that employs a broadband
visible light source with high sensitivity detectors to achieve
precision measurement of transmission and reflection light intensity
simultaneously during transparent film depositions.
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