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• Thin and thick film step heights measurement • Surface Roughness measurement • Quantify scratch and dig features, wear depth, width and volume • Flatness or curvature measurement • 2D thin film stress measurement • Film thickness • Surface Profiling - defect, features etc.
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• Contact Profilometer • Optical Profilometer • Combined Optical + Contact Profilometer • Stress Monitor • Optical Process Controller
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